JPH0424079U - - Google Patents

Info

Publication number
JPH0424079U
JPH0424079U JP6587890U JP6587890U JPH0424079U JP H0424079 U JPH0424079 U JP H0424079U JP 6587890 U JP6587890 U JP 6587890U JP 6587890 U JP6587890 U JP 6587890U JP H0424079 U JPH0424079 U JP H0424079U
Authority
JP
Japan
Prior art keywords
electrostatic breakdown
semiconductor
breakdown test
measuring
test device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6587890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6587890U priority Critical patent/JPH0424079U/ja
Publication of JPH0424079U publication Critical patent/JPH0424079U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP6587890U 1990-06-21 1990-06-21 Pending JPH0424079U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6587890U JPH0424079U (en]) 1990-06-21 1990-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6587890U JPH0424079U (en]) 1990-06-21 1990-06-21

Publications (1)

Publication Number Publication Date
JPH0424079U true JPH0424079U (en]) 1992-02-27

Family

ID=31598108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6587890U Pending JPH0424079U (en]) 1990-06-21 1990-06-21

Country Status (1)

Country Link
JP (1) JPH0424079U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414899U (en]) * 1987-07-16 1989-01-25
JP2010062344A (ja) * 2008-09-04 2010-03-18 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体用ウエハの評価方法、半導体ウエハの製造方法及び半導体ウエハの製造工程の評価方法
JP2013195098A (ja) * 2012-03-16 2013-09-30 Fujitsu Semiconductor Ltd 試験装置、試験冶具および試験方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414899U (en]) * 1987-07-16 1989-01-25
JP2010062344A (ja) * 2008-09-04 2010-03-18 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体用ウエハの評価方法、半導体ウエハの製造方法及び半導体ウエハの製造工程の評価方法
JP2013195098A (ja) * 2012-03-16 2013-09-30 Fujitsu Semiconductor Ltd 試験装置、試験冶具および試験方法

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